Product Overview
1: Function : to measure and control flow rate of gases and chemicals accurately
2: Application : be used in all applications and industries in which needs to control
accurately flow rate of gases and chemicals.
For example : semiconductor, photovoltatics solar cells, vacuum
coating, pharmaceutical, fiber optics, flat panel display …
Technical Specifications
Model | MF-C, S48, S600, SEC-E40, SEC-N100, SEC-Z500X, D500 | |||||||
Flow Rate Range | 10 SCCM ÷ 1000 SLM | |||||||
Precision | ± 1.0 % of reading scale | |||||||
Gas Type | All gases, for example : N2, O2, H2, Ar, C2H4, HF, SiH4, SF6 … | |||||||
Communication | Digital, Analog, DeviceNet™, PROFIBUS™, and EtherCAT® | |||||||
Advantages | – No. 1 in the world, account for 60% market share for MFC product – Have local expert in Vietnam, support 24/7 for all enquiries. – Have many models – Provide competitive price matching with customer’s budget and application – Warranty : 1 year | |||||||
Application | 1: Function : to measure and control flow rate of gases and chemicals accurately 2: Application : be used in all applications and industries in which needs to control accurately flow rate of gases and chemicals. For example : semiconductor, photovoltatics solar cells, vacuum coating, pharmaceutical, fiber optics, flat panel display … |