Model
CDX-L15A/LW15A |
Repeat accuracy
0.25 μm |
Measurement range*1
15 +/-1 mm |
Reflection mode
Specular |
CDX-30A/W30A | 0.25 μm | 30 +/-5 mm | Specular / Diffuse |
CDX-85A/W85A | 0.25 μm | 85 +/-20 mm | Specular / Diffuse |
CDX-150A/W150A | 0.25 μm | 150 +/-40 mm | Diffuse |
*1: Value of diffuse installation |